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Title (journal) Data Rec., Storage & Processing. — 2006. — Vol. 8, N 1.
Pages 3-8
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Title (article) Formation of Information Relief in Certain Nonmetal Materials
Authors Kossko I.A., Kryuchin A.A., Kravets V.G., Mohnyuk A.A., Oberemok A.S.
Kiev, Ukraine
Annotation An opportunity of forming the information relief in certain nonmetal materials obtained by a tech-nique of reaction baking and hot pressing (SiC, SiC+В4С and Si3N4, Si3N4+В4С, AlN) as well as in monocrystalline silicon is investigated. For obtaining a microrelief the plasmochemical etching technique is used. Tabl.: 1. Fig.: 2. Refs: 7 titles
Key words ceramics, plasmochemical etching, information relief.
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